RE: [SI-LIST] : Resistivity of IC routing

Christophe Bianchi (Christophe@Frequency.com)
Mon, 9 Aug 1999 08:43:37 -0700

Sincerely,

Christophe

> -----Original Message-----
> From: Chris.H.Simon@gd-is.com [SMTP:Chris.H.Simon@gd-is.com]
> Sent: Friday, August 06, 1999 1:48 PM
> To: si-list@silab.eng.sun.com
> Subject: [SI-LIST] : Resistivity of IC routing
>
>
>
> I'm looking at the characteristics of signals on an IC (an area I don't
> have
> much experience with) and began to wonder about such basic things as
> resistance
> vs. temperature. Is the metalization (in a deep-sub micron bulk CMOS
> process)
> pure Aluminum, so that I can use the resistivity and temperature
> coefficient
> from my college physics textbook (2.8E-8 Ohms/m at 20C and 3.9E-3 1/C) or
> is it
> an alloy with slightly different resistive characteristics?
>
> Thanks,
>
> Chris Simon
> General Dynamics
>
>
>
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