RE: [SI-LIST] : Resistivity of IC routing

Lynne Green (green@wolfenet.com)
Sat, 07 Aug 1999 09:00:02 -0700 (PDT)

Chris-

Depends on the foundry's IC process. Would not assume pure aluminum.
Would not assume that bulk values apply.

1) Planar processes are often layers of copper, aluminum, and other metals to
make the copper stick to but not penetrate the silicon.

2) The layers are so thin, even for aluminum, that surface effects can be
important, so the bulk value is at best an estimate.

Lynne Green
HyperLynx
lgreen@hyperlynx.com

On 06-Aug-99 Chris.H.Simon@gd-is.com wrote:
>
>
> I'm looking at the characteristics of signals on an IC (an area I don't have
> much experience with) and began to wonder about such basic things as
> resistance
> vs. temperature. Is the metalization (in a deep-sub micron bulk CMOS
> process)
> pure Aluminum, so that I can use the resistivity and temperature coefficient
> from my college physics textbook (2.8E-8 Ohms/m at 20C and 3.9E-3 1/C) or is
> it
> an alloy with slightly different resistive characteristics?
>
> Thanks,
>
> Chris Simon
> General Dynamics
>
>
>
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