[SI-LIST] : Resistivity of IC routing

Chris.H.Simon@gd-is.com
Fri, 6 Aug 1999 15:48:03 -0500

I'm looking at the characteristics of signals on an IC (an area I don't have
much experience with) and began to wonder about such basic things as resistance
vs. temperature. Is the metalization (in a deep-sub micron bulk CMOS process)
pure Aluminum, so that I can use the resistivity and temperature coefficient
from my college physics textbook (2.8E-8 Ohms/m at 20C and 3.9E-3 1/C) or is it
an alloy with slightly different resistive characteristics?

Thanks,

Chris Simon
General Dynamics

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