Here are some more data points for your comparison table, this time
simulated with the SIMIAN Version 2.1 tool developed at the University
of Texas, Austin.
Using the same input geometry as you suggested for the Microstrip problem:
1.0769E-3 Ohms/sqrt(Hz)*meter @ 100MHz
1.3958e-3 Ohms/sqrt(Hz)*meter @ 1GHz
1.4815e-3 Ohms/sqrt(Hz)*meter @ 5GHz
* The numbers include the effect of a lossy ground plane.
* The extractor accounts for proximity effect (I think).
* Rdc of 4.454 ohms/meter was backed out of the calculated #'s
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