E-Beam Lithography
Erik Johnson School of Engineering and Computer Science
The University of Texas at Dallas

Contact info:

Keith Bradshaw
P.O. Box 830688, EC 33
Richardson, TX 76080-0688
Phone: (972) 883-2099
Fax: (972) 744-9145

[email protected]

Current Capabilities:
 

The pictures of our capabilities are somewhat outdated, as of late we are building  Microelectromechanical Systems (MEMS), and we have better than .25 micron (250 nanometer) resolution.  We are working presently on comb drives using features of that resolution, which will greatly increase the work that the drive will be able to do proportional to drives 10 times its size.  We are also doing micro-printing, making security labels the size of a speck of sand which have a name and serial number to track stolen goods.  

 

My dream in the research is to drive a MEMS device using only RF energy, with no strings (wires or otherwise) attached.  Imagine a remote control car 10 times smaller than a microscopic dust mite!  That is my dream, and there are many others like it in our group. These are the tools we are using to realize these dreams.... 

Pictures:

E-Beam XIV, operational as of Feb. 20, 2000
     
 

SEM image of .5 micron lines, at 1 micron spacing, shot 3/23/2000 on E-Beam XIV

 
 
 
 

SEM image of the above lines, showing the overlapping fields:

 

Bay 3, where we do most of our lithography work, the E-Beam is just on the other side of the glass door in the center of the picture:

Bay 2, which houses the Scanning Electron Microscope, the Atomic Force Microscope, and various optical microscopes:

Our Phillips XL 30 SEM:


Justin  manning the SEM and using the EDAX to analyze the composition of a substrate.


Keith manning the SEM, testing the capabilities of the E-Beam.

Our Park Scientific Atomic Force Microscope:

For more Pictures and a clickable map of all the cleanroom facilities, click here.

More to come!

Last updated:  July 3, 2000